发明授权
- 专利标题: Substrate support with clamping electrical connector
- 专利标题(中): 带夹紧电连接器的基板支撑
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申请号: US11145258申请日: 2005-06-03
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公开(公告)号: US07354288B2公开(公告)日: 2008-04-08
- 发明人: Kazutoshi Maehara , Visweswaren Sivaramakrishnan , Kentaro Wada , Mark A. Fodor , Andrzei Kaszuba
- 申请人: Kazutoshi Maehara , Visweswaren Sivaramakrishnan , Kentaro Wada , Mark A. Fodor , Andrzei Kaszuba
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Janah & Associates
- 主分类号: H01R4/60
- IPC分类号: H01R4/60
摘要:
A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.
公开/授权文献
- US20060272774A1 Substrate support with clamping electrical connector 公开/授权日:2006-12-07
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