Invention Grant
- Patent Title: Sensor chip and apparatus for tactile and/or flow sensing
- Patent Title (中): 用于触觉和/或流量感测的传感器芯片和设备
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Application No.: US10861096Application Date: 2004-06-04
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Publication No.: US07357035B2Publication Date: 2008-04-15
- Inventor: Chang Liu , Jack Chen , Jonathan Engel
- Applicant: Chang Liu , Jack Chen , Jonathan Engel
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Greer, Burns & Crain, Ltd.
- Main IPC: G01B7/16
- IPC: G01B7/16
Abstract:
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
Public/Granted literature
- US20050021247A1 Sensor chip and apparatus for tactile and/or flow sensing Public/Granted day:2005-01-27
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