发明授权
- 专利标题: Pattern density control using edge printing processes
- 专利标题(中): 图案密度控制采用边缘印刷工艺
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申请号: US11163968申请日: 2005-11-04
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公开(公告)号: US07358140B2公开(公告)日: 2008-04-15
- 发明人: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III
- 申请人: Toshiharu Furukawa , Mark C. Hakey , Steven J. Holmes , David V. Horak , Charles W. Koburger, III
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 William D. Sabo
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A structure fabrication method. The method comprises providing a design structure that includes (i) a design substrate and (ii) M design normal regions on the design substrate, wherein M is a positive integer greater than 1. Next, N design sacrificial regions are added between two adjacent design normal regions of the M design normal regions, wherein N is a positive integer. Next, an actual structure is provided that includes (i) an actual substrate corresponding to the design substrate, (ii) a to-be-etched layer on the actual substrate, and (iii) a memory layer on the to-be-etched layer. Next, an edge printing process is performed on the memory layer so as to form (a) M normal memory portions aligned with the M design normal regions and (b) N sacrificial memory portions aligned with the N design sacrificial regions.
公开/授权文献
- US20070105319A1 PATTERN DENSITY CONTROL USING EDGE PRINTING PROCESSES 公开/授权日:2007-05-10