发明授权
- 专利标题: Bi-directional read/program non-volatile floating gate memory array, and method of formation
- 专利标题(中): 双向读/写非挥发性浮栅存储器阵列及其形成方法
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申请号: US11239791申请日: 2005-09-29
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公开(公告)号: US07358559B2公开(公告)日: 2008-04-15
- 发明人: Felix (Ying-Kit) Tsui , Jeng-Wei Yang , Bomy Chen , Chun-Ming Chen , Dana Lee , Changyuan Chen
- 申请人: Felix (Ying-Kit) Tsui , Jeng-Wei Yang , Bomy Chen , Chun-Ming Chen , Dana Lee , Changyuan Chen
- 申请人地址: US CA Sunnyvale
- 专利权人: Silicon Storage Technology, Inc.
- 当前专利权人: Silicon Storage Technology, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: DLA Piper US LLP
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A bi-directional read/program non-volatile memory cell and array is capable of achieving high density. Each memory cell has two spaced floating gates for storage of charges thereon. The cell has spaced apart source/drain regions with a channel therebetween, with the channel having three portions. One of the floating gate is over a first portion; another floating gate is over a second portion, and a gate electrode controls the conduction of the channel in the third portion between the first and second portions. A control gate is connected to each of the source/drain regions, and is also capacitively coupled to the floating gate. The cell programs by hot channel electron injection, and erases by Fowler-Nordheim tunneling of electrons from the floating gate to the gate electrode. Bi-directional read permits the cell to be programmed to store bits, with one bit in each floating gate. An array of such memory cells comprises rows of cells in active regions adjacent to one another separated from one another by the semiconductive substrate material without any isolation material. Cells in the same column have the source/drain region in common, the drain/source region in common and a first and second control gates in each of the trenches in common. Cells in adjacent columns have the source/drain in common and the first control gate in common.
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