发明授权
US07360428B2 Capacitive pressure measuring cell with a membrane bed 有权
带有膜床的电容式压力测量池

Capacitive pressure measuring cell with a membrane bed
摘要:
The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is subjected to a deflection which is dependent on a pressure that is to be measured. The cell also comprises a membrane bed, formed by a surface of the base body that faces the membrane, at least one electrode being mounted on said bed. Said electrode, together with a counter-electrode that is mounted on the membrane, forms a capacitor, whose capacitance represents a measurement for the deflection of the membrane. The measuring cell is characterized in that the electrode is electrically connected through the base body and that the measuring chamber has a smooth surface in the contact zone, said surface having a contact pin that is guided in a bore through the base body. The electrode is electrically connected by means of said pin for measuring the capacitance and the pin is soldered into the bore on the membrane side, using a solder. The contact pin, the solder and the membrane bed form a smooth surface.
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