发明授权
- 专利标题: Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm
- 专利标题(中): 压力传感器装置包括隔膜和具有面向隔膜的曲面的止挡件
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申请号: US10567999申请日: 2004-08-20
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公开(公告)号: US07360431B2公开(公告)日: 2008-04-22
- 发明人: Masayuki Yoneda , Jun Mizoguchi , Yasuhiro Kajio , Masaya Ishikawa , Youichi Azuma , Naohisa Tsuchiya
- 申请人: Masayuki Yoneda , Jun Mizoguchi , Yasuhiro Kajio , Masaya Ishikawa , Youichi Azuma , Naohisa Tsuchiya
- 申请人地址: JP Chiyoda-Ku, Tokyo
- 专利权人: Yamatake Corporation
- 当前专利权人: Yamatake Corporation
- 当前专利权人地址: JP Chiyoda-Ku, Tokyo
- 代理机构: Frishauf, Holtz, Goodman & Chick, P.C.
- 优先权: JP2003-296695 20030820
- 国际申请: PCT/JP2004/012001 WO 20040820
- 国际公布: WO2005/019789 WO 20050303
- 主分类号: G01L9/12
- IPC分类号: G01L9/12
摘要:
The pressure sensor device has a laminated diaphragm (12) in which a strain resistance gauge is formed in a surface and a stopper member (13) including a concave portion forming a curved surface parallel to a surface formed by displacement of the diaphragm, the concave portion being disposed to face the diaphragm. Specifically, the concave portion of the stopper member is formed into a curved surface in which depth y at a distance x from the center of the diaphragm is expressed by a quartic function [y=pr4(1−x2/r2)2/64D] in relation to the operating pressure for protection against maximum pressure p when the diaphragm has a radius of r, a thickness of t, and a flexural rigidity of D.
公开/授权文献
- US20060272422A1 Pressure sensor device 公开/授权日:2006-12-07
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