发明授权
US07360431B2 Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm 有权
压力传感器装置包括隔膜和具有面向隔膜的曲面的止挡件

Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm
摘要:
The pressure sensor device has a laminated diaphragm (12) in which a strain resistance gauge is formed in a surface and a stopper member (13) including a concave portion forming a curved surface parallel to a surface formed by displacement of the diaphragm, the concave portion being disposed to face the diaphragm. Specifically, the concave portion of the stopper member is formed into a curved surface in which depth y at a distance x from the center of the diaphragm is expressed by a quartic function [y=pr4(1−x2/r2)2/64D] in relation to the operating pressure for protection against maximum pressure p when the diaphragm has a radius of r, a thickness of t, and a flexural rigidity of D.
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