Invention Grant
- Patent Title: Imaging apparatus for high probe currents
- Patent Title (中): 高探头电流成像设备
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Application No.: US11370224Application Date: 2006-03-07
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Publication No.: US07361897B2Publication Date: 2008-04-22
- Inventor: Ralf Degenhardt
- Applicant: Ralf Degenhardt
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP05005028 20050308
- Main IPC: H01J3/14
- IPC: H01J3/14 ; H01J37/26 ; G01N23/00

Abstract:
An imaging apparatus is provided, comprising a first lens, a Wien filter having a first opening and a second opening, and further comprising a 2*m-pole element, m≧2, and a second lens, wherein said first lens is disposed upstream said first opening of the Wien filter and said second lens is disposed downstream said second opening of the Wien filter, and an intermediate image plane of the first lens is located between said first opening and said first lens and an intermediate object plane of the second lens is located between said second opening and said second lens, and wherein said Wien filter is adapted for dispersion-free imaging of a stigmatic image formed in said intermediate image plane of said first lens into a stigmatic image formed in said intermediate object plane of said second lens.
Public/Granted literature
- US20060219915A1 Imaging apparatus for high probe currents Public/Granted day:2006-10-05
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