发明授权
- 专利标题: Imaging system, in particular a projection objective of a microlithographic projection exposure apparatus
- 专利标题(中): 成像系统,特别是微光刻投影曝光装置的投影物镜
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申请号: US11492725申请日: 2006-07-25
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公开(公告)号: US07362514B2公开(公告)日: 2008-04-22
- 发明人: Karl-Heinz Schuster
- 申请人: Karl-Heinz Schuster
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G02B3/02
- IPC分类号: G02B3/02
摘要:
Imaging systems, in particular a projection objectives of a microlithographic projection exposure apparatus, are provided. The imaging systems can have an optical axis and produce an image field which is extra-axial relative to the optical axis. The imaging systems can include a first optical element which causes a first distribution of the retardation in a plane that lies perpendicular to the optical axis, and at least one second optical element which causes a second distribution of the retardation in a plane that lies perpendicular to the optical axis. The second distribution of the retardation can at least partially compensate the first distribution of the retardation. The first and the second optical elements can be designed without rotational symmetry relative to the optical axis.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B3/00 | 简单或复合透镜 |
G02B3/02 | .具有非球面的(G02B3/10优先) |