- 专利标题： Internal member for plasma-treating vessel and method of producing the same
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申请号： US11072448申请日： 2005-03-07
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公开(公告)号： US07364798B2公开(公告)日： 2008-04-29
- 发明人: Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- 申请人： Yoshio Harada , Junichi Takeuchi , Nobuyuki Nagayama , Kouji Mitsuhashi
- 申请人地址： JP Hyogo JP Tokyo
- 专利权人： Tocalo Co., Ltd.,Tokyo Electron Limited
- 当前专利权人： Tocalo Co., Ltd.,Tokyo Electron Limited
- 当前专利权人地址： JP Hyogo JP Tokyo
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JP11-351546 19991210
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; B32B3/10
摘要：
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.