发明授权
- 专利标题: Photocathode
- 专利标题(中): 光电阴极
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申请号: US11055663申请日: 2005-02-11
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公开(公告)号: US07365356B2公开(公告)日: 2008-04-29
- 发明人: Toru Hirohata , Minoru Niigaki , Tomoko Mochizuki , Masami Yamada
- 申请人: Toru Hirohata , Minoru Niigaki , Tomoko Mochizuki , Masami Yamada
- 申请人地址: JP Shizuoka
- 专利权人: Hamamatsu Photonics K.K.
- 当前专利权人: Hamamatsu Photonics K.K.
- 当前专利权人地址: JP Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JPP2002-331142 20021114
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/072
摘要:
The invention relates to a photocathode having a structure that permits a decrease in the radiant sensitivity at low temperatures is suppressed so that the S/N ratio is improved. In the photocathode, a light absorbing layer is formed on the upper layer of a substrate. An electron emitting layer is formed on the upper layer of the light absorbing layer. A contact layer having a striped-shape is formed on the upper layer of the electron emitting layer. A surface electrode composed of metal is formed on the surface of the contact layer. The interval between bars in the contact layer is adjusted so as to become 0.2 μm or more but 2 μm or less.
公开/授权文献
- US20050168144A1 Photocathode 公开/授权日:2005-08-04
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