Invention Grant
- Patent Title: Low-voltage flexible optic polymer modulators
- Patent Title (中): 低压柔性光学聚合物调制器
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Application No.: US11112870Application Date: 2005-04-21
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Publication No.: US07366363B2Publication Date: 2008-04-29
- Inventor: William H. Steier , Hyun-Chae Song , Min-Cheol Oh , Seh-Won Ahn
- Applicant: William H. Steier , Hyun-Chae Song , Min-Cheol Oh , Seh-Won Ahn
- Applicant Address: US CA Los Angeles
- Assignee: University of Southern California
- Current Assignee: University of Southern California
- Current Assignee Address: US CA Los Angeles
- Agency: Fish & Richardson P.C.
- Main IPC: G02F1/035
- IPC: G02F1/035 ; G02F1/295 ; H01L21/70

Abstract:
An electro-optic modulator is formed from all flexible materials, to form a flexible electro-optic modulator. The formation process uses a photoresist which selectively adheres to one material more than it adheres to another material. This allows selective liftoff, where only parts of the substrate are lifted off. For example, this allows silicon ends on the modulator, thereby facilitating pig tailing and also facilitates handling. Another aspect describes testing the bending radius.
Public/Granted literature
- US20050249445A1 Low-voltage flexible optic polymer modulators Public/Granted day:2005-11-10
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