发明授权
US07367112B2 Method of fabricating a head for perpendicular magnetic recording with a self-aligning side shield structure 失效
用自对准侧屏蔽结构制造用于垂直磁记录的磁头的方法

Method of fabricating a head for perpendicular magnetic recording with a self-aligning side shield structure
摘要:
A method is provided for fabricating a head for perpendicular recording with self-aligning side shields. The voids where the side shields will be formed are milled into the layer of material for the pole tip to achieve self-alignment. A mask is patterned with openings defining initial shape of the pole piece tip nearest the air-bearing surface including the width and the point at which the pole tip widens out. A film of soft magnetic material to form the side shields is deposited over the wafer. A chemical-mechanical-polishing process is preferably used to remove the mask and the material deposited on it. A new mask is patterned over the predetermined area for the final shape of the pole tip and the side shields. The excess side shield material and pole tip material outside of the mask is then removed.
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