Invention Grant
- Patent Title: Method of making a differential pressure sensor
- Patent Title (中): 制造差压传感器的方法
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Application No.: US11053115Application Date: 2005-02-07
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Publication No.: US07368313B2Publication Date: 2008-05-06
- Inventor: Hubert Benzel , Gerhard Lammel
- Applicant: Hubert Benzel , Gerhard Lammel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102004007519 20040217; DE102004015444 20040728
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
In a method for manufacturing a micromechanical semiconductor component, e.g., a pressure sensor, a locally limited, buried, and at least partially oxidized porous layer is produced in a semiconductor substrate. A cavity is subsequently produced in the semiconductor substrate from the back, directly underneath the porous first layer, using a trench etch process. The porous first layer is used as a stop layer for the trench. Thin diaphragms having a low thickness tolerance may thus be produced for differential pressure measurement.
Public/Granted literature
- US20050199973A1 Differential pressure sensor Public/Granted day:2005-09-15
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