Invention Grant
- Patent Title: Advanced pattern definition for particle-beam exposure
- Patent Title (中): 粒子束曝光的高级图案定义
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Application No.: US11119514Application Date: 2005-04-29
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Publication No.: US07368738B2Publication Date: 2008-05-06
- Inventor: Elmar Platzgummer
- Applicant: Elmar Platzgummer
- Applicant Address: DE Jena
- Assignee: Carl Zeiss SMS GmbH
- Current Assignee: Carl Zeiss SMS GmbH
- Current Assignee Address: DE Jena
- Agency: Jones Day
- Priority: ATA755/2004 20040430
- Main IPC: G21K1/087
- IPC: G21K1/087

Abstract:
In a pattern definition device for use in a particle-beam exposure apparatus a plurality of blanking openings (910) are arranged within a pattern definition field (bf) composed of a plurality of staggered lines (bl) of blanking openings, each provided with a deflection means controllable by a blanking signal (911); for the lines of blanking openings, according to a partition of the blanking openings of a line into several groups (g4,g5,g6), the deflection means of the blanking openings of each group are fed a common group blanking signal (911), and the group blanking signal of each group of a line is fed to the blanking means and connected to the respective blanking openings independently of the group blanking signals of the other groups of the same line.
Public/Granted literature
- US20050242303A1 Advanced pattern definition for particle-beam exposure Public/Granted day:2005-11-03
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