Invention Grant
- Patent Title: Carbon nanotube structure and method of vertically aligning carbon nanotubes
- Patent Title (中): 碳纳米管结构和垂直排列碳纳米管的方法
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Application No.: US11455192Application Date: 2006-06-19
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Publication No.: US07371696B2Publication Date: 2008-05-13
- Inventor: Yong-Wan Jin , Jong-Min Kim , Hee-Tae Jung , Tae-Won Jeong , Young-Koan Ko
- Applicant: Yong-Wan Jin , Jong-Min Kim , Hee-Tae Jung , Tae-Won Jeong , Young-Koan Ko
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung SDI Co., Ltd.
- Current Assignee: Samsung SDI Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0095497 20051011
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/469
Abstract:
A Carbon NanoTube (CNT) structure includes a substrate, a CNT support layer, and a plurality of CNTs. The CNT support layer is stacked on the substrate and has pores therein. One end of each of the CNTs is attached to portions of the substrate exposed through the pores and each of the CNTs has its lateral sides supported by the CNT support layer. A method of vertically aligning CNTs includes: forming a first conductive substrate; stacking a CNT support layer having pores on the first conductive substrate; and attaching one end of the each of the CNTs to portions of the first conductive substrate exposed through the pores.
Public/Granted literature
- US20070082426A1 Carbon nanotube structure and method of vertically aligning carbon nanotubes Public/Granted day:2007-04-12
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