发明授权
- 专利标题: Scanning transmission electron microscope and scanning transmission electron microscopy
- 专利标题(中): 扫描透射电子显微镜和扫描透射电子显微镜
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申请号: US11806120申请日: 2007-05-30
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公开(公告)号: US07372029B2公开(公告)日: 2008-05-13
- 发明人: Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
- 申请人: Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2005-004660 20050112
- 主分类号: G21K7/00
- IPC分类号: G21K7/00 ; G01N23/00
摘要:
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
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