发明授权
US07372029B2 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
扫描透射电子显微镜和扫描透射电子显微镜

Scanning transmission electron microscope and scanning transmission electron microscopy
摘要:
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
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