Invention Grant
US07374966B2 Apparatus for stacking semiconductor chips, method for manufacturing semiconductor package using the same and semiconductor package manufactured thereby
有权
用于堆叠半导体芯片的装置,使用该半导体芯片的半导体封装的制造方法以及由此制造的半导体封装
- Patent Title: Apparatus for stacking semiconductor chips, method for manufacturing semiconductor package using the same and semiconductor package manufactured thereby
- Patent Title (中): 用于堆叠半导体芯片的装置,使用该半导体芯片的半导体封装的制造方法以及由此制造的半导体封装
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Application No.: US11534924Application Date: 2006-09-25
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Publication No.: US07374966B2Publication Date: 2008-05-20
- Inventor: Min-Ill Kim , Dong-Kuk Kim , Chang-Cheol Lee , Tae-Hoe Hwang , Jae-Young Hong
- Applicant: Min-Ill Kim , Dong-Kuk Kim , Chang-Cheol Lee , Tae-Hoe Hwang , Jae-Young Hong
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR2003-63132 20030909
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention relates to an apparatus for stacking semiconductor chips, a method for manufacturing a semiconductor package using the same and a semiconductor package manufactured thereby. The apparatus for stacking semiconductor chips may comprise two tables for supporting wafers, a picker for picking up semiconductor chips and a picker transfer unit for moving the picker vertically and horizontally. The method for manufacturing a semiconductor package using the same may allow easy and rapid stacking of semiconductor chips, thereby improving the productivity of semiconductor package manufacture. Further, a semiconductor chip having a relatively thick film is attached onto another semiconductor chip having a relatively thin film. The thicker semiconductor chip may protect the thinner semiconductor chip from faults such as chipping or warpage which may occur due to external shocks such as that caused by a picker, thereby improving the reliability of the package.
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