发明授权
- 专利标题： Encapsulation of nano-dimensional structures by oxidation
- 专利标题（中）： 通过氧化封装纳米尺寸结构
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申请号： US11174896申请日： 2005-07-05
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公开(公告)号： US07381658B2公开(公告)日： 2008-06-03
- 发明人: Peter Mardilovich , Pavel Komilovich , Randy Hoffman
- 申请人： Peter Mardilovich , Pavel Komilovich , Randy Hoffman
- 申请人地址： US TX Houston
- 专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人地址： US TX Houston
- 主分类号： H01L21/31
- IPC分类号： H01L21/31 ; H01L21/469
摘要：
This invention relates to a method of encapsulating nano-dimensional structures, comprising: depositing at least one material upon a substrate such that the material includes at least one portion; and creating an oxidized layer located substantially adjacent to the deposited material such that the at least one portion of the deposited material becomes substantially encapsulated by a portion of the oxidized layer.
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