发明授权
- 专利标题： Method of fabricating a surface shape recognition sensor
- 专利标题（中）： 制作表面形状识别传感器的方法
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申请号： US11704024申请日： 2007-02-07
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公开(公告)号： US07381663B2公开(公告)日： 2008-06-03
- 发明人: Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura
- 申请人： Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura
- 申请人地址： JP Tokyo
- 专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Blakely, Sokoloff, Taylor & Zafman LLP
- 优先权： JP2003-038915 20030217; JPPCT/JP2004/001532 20040213
- 主分类号： H01L29/78
- IPC分类号： H01L29/78
摘要：
A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (1110b) is formed on the upper electrode (110a) in a region above each lower electrode 105a in one-to-one correspondence with the lower electrode (105a). An object of surface shape sensing, e.g., the tip of a finger (1602) touches the surface of the overhang of the structure (113b), and the support portion of the structure (113b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
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