发明授权
- 专利标题： Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus
- 专利标题（中）： 液滴喷射装置，液滴喷射系统，电光装置，电光装置的制造方法，金属布线的形成方法以及电子装置
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申请号： US10739906申请日： 2003-12-18
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公开(公告)号： US07384140B2公开(公告)日： 2008-06-10
- 发明人: Kenji Kojima , Tatsuo Yoda
- 申请人： Kenji Kojima , Tatsuo Yoda
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2002-369061 20021219
- 主分类号： B41J2/01
- IPC分类号： B41J2/01
摘要：
A liquid droplet ejecting apparatus including a main body, a work carrying table for supporting a work, an Y-directional movement mechanism for moving the work carrying table in the horizontal direction relative to the main body, a droplet ejecting head for ejecting liquid droplets to the work supported by the work carrying table, and at least one blowing unit for blowing a gas towards the work supported by the work carrying table to dry the liquid droplets ejected to the work, wherein the gas has a condition almost equal to the atmosphere in which the liquid droplet ejecting apparatus is placed.
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