发明授权
US07385229B2 Flip-chip light emitting diode with a thermally stable multiple layer reflective p-type contact
有权
倒装芯片发光二极管,具有热稳定的多层反射型p型接触
- 专利标题: Flip-chip light emitting diode with a thermally stable multiple layer reflective p-type contact
- 专利标题(中): 倒装芯片发光二极管,具有热稳定的多层反射型p型接触
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申请号: US11482362申请日: 2006-07-07
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公开(公告)号: US07385229B2公开(公告)日: 2008-06-10
- 发明人: Hari S. Venugopalan
- 申请人: Hari S. Venugopalan
- 申请人地址: US OH Valley View
- 专利权人: Lumination LLC
- 当前专利权人: Lumination LLC
- 当前专利权人地址: US OH Valley View
- 代理机构: Fay Sharpe LLP
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
A p-type contact (30) is disclosed for flip chip bonding and electrically contacting a p-type group III-nitride layer (28) of a group III-nitride flip chip light emitting diode die (10) with a bonding pad (60). A first palladium layer (42) is disposed on the p-type group III-nitride layer (28). The first palladium layer (42) is diffused through a native oxide of the p-type group III-nitride layer (28) to make electrical contact with the p-type group III-nitride layer (28). A reflective silver layer (44) is disposed on the first palladium layer (42). A second palladium layer (46) is disposed on the silver layer (44). A bonding stack (48) including at least two layers (50, 52, 54) is disposed on the second palladium layer (46). The bonding stack (48) is adapted for flip chip bonding the p-type layer (28) to the bonding pad (60).
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