发明授权
- 专利标题: Positioning system, magnetic bearing, and method of controlling the same
- 专利标题(中): 定位系统,磁轴承及其控制方法
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申请号: US11282713申请日: 2005-11-21
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公开(公告)号: US07385318B2公开(公告)日: 2008-06-10
- 发明人: Yoshihiro Hirata
- 申请人: Yoshihiro Hirata
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2004-337357 20041122
- 主分类号: H02K41/00
- IPC分类号: H02K41/00
摘要:
A stage system and a control method therefor. In one aspect, the stage system includes a stage which is going to be positioned, a magnetic material member provided on the stage, electromagnets disposed at opposite sides of the magnetic material member, a detector for detecting an electrical current value of a coil, which is a component of the electromagnets, and a position detector for detecting a position of the stage. The center position of the magnetic material member between the electromagnets can be determined on the basis of a relation between the position of the stage and the electrical current value of the coil, as the magnetic material member is moved relative to the electromagnets.