发明授权
- 专利标题: Laser tracking interferometer
- 专利标题(中): 激光跟踪干涉仪
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申请号: US11458533申请日: 2006-07-19
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公开(公告)号: US07388674B2公开(公告)日: 2008-06-17
- 发明人: Shinichirou Yanaka , Makoto Abe , Shinichi Hara , Naoyuki Taketomi
- 申请人: Shinichirou Yanaka , Makoto Abe , Shinichi Hara , Naoyuki Taketomi
- 申请人地址: JP Kawasaki-shi
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2005-216110 20050726
- 主分类号: G01B9/06
- IPC分类号: G01B9/06
摘要:
A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector. The laser tracking interferometer includes: a reference sphere; a carriage that rotates about a center of the reference sphere; a laser interferometer; a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage; a data processing apparatus for computing a displacement of the retroreflector; a position sensitive detector for providing a position signal corresponding to deviation of a laser beam; and a controller for controlling rotation of the carriage based on the position signal so that the amount of deviation becomes zero.
公开/授权文献
- US20070024861A1 LASER TRACKING INTERFEROMETER 公开/授权日:2007-02-01
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