Invention Grant
US07388707B2 High-resolution spatial light modulation 有权
高分辨率空间光调制

High-resolution spatial light modulation
Abstract:
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror that includes a hinge member having a first end and a second end. The first end and second end is secured to the top surface of the first support post and the second support post, respectively. The hinge member and the support posts are completely hidden underneath the micro mirror.
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