发明授权
- 专利标题: Method for manufacturing printing plate
- 专利标题(中): 印版制造方法
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申请号: US11476660申请日: 2006-06-29
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公开(公告)号: US07390422B2公开(公告)日: 2008-06-24
- 发明人: Soon Sung Yoo , Oh Nam Kwon , Heung Lyul Cho , Jung Jae Lee , Seung Hee Nam
- 申请人: Soon Sung Yoo , Oh Nam Kwon , Heung Lyul Cho , Jung Jae Lee , Seung Hee Nam
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: KR10-2005-0058303 20050630
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method for manufacturing a printing plate is realizes a precise and fine pattern by minimizing a variation of etching critical dimension. The method includes forming a hard mask having an opening on an insulating substrate; forming a first trench having a first depth in the insulating substrate using the hard mask; coating, patterning and developing a first photoresist over an entire surface of the insulating substrate including the hard mask; and forming at least a second trench having a second depth in the insulating substrate using the hard mask, wherein the second depth is deeper than the first depth.
公开/授权文献
- US20070015093A1 Method for manufacturing printing plate 公开/授权日:2007-01-18
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