发明授权
- 专利标题: Scanning probe microscope
- 专利标题(中): 扫描探针显微镜
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申请号: US11368204申请日: 2006-03-02
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公开(公告)号: US07391022B2公开(公告)日: 2008-06-24
- 发明人: Masahiro Ohta
- 申请人: Masahiro Ohta
- 申请人地址: JP Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: J.C. Patents
- 优先权: JP2005-066193 20050309
- 主分类号: G01N23/00
- IPC分类号: G01N23/00 ; G01N13/16
摘要:
A scanning probe microscope (SPM) is provided capable of a narrow to a wide range observation according to observed targets or purposes without replacing a scanner while maintaining a high resolution. The SPM is provided with a probe-side scanner 10 and a sample-side scanner 11. The probe-side scanner 10 is to move the probe 13 in X-, Y-, Z-axis directions, and the sample-side scanner 11 is to move the sample 12 in the X-, Y-, Z-axis directions. A scanner with a small maximum scan range is used as the probe-side scanner 10; a scanner with a large maximum scan range is used as the sample-side scanner 11; and both can be switched between each scanner for use according to the observed targets or purposes. Alternatively, the probe-side scanner 10 is used for scanning in a narrow range, and the sample-side scanner 11 is used to move the field of view.
公开/授权文献
- US20060219899A1 Scanning probe microscope 公开/授权日:2006-10-05
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