发明授权
- 专利标题: Planar ultra violet light detector
- 专利标题(中): 平面紫外光检测器
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申请号: US10735531申请日: 2003-12-12
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公开(公告)号: US07391147B2公开(公告)日: 2008-06-24
- 发明人: Barrett E. Cole , Robert E. Higashi
- 申请人: Barrett E. Cole , Robert E. Higashi
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号: H05H7/06
- IPC分类号: H05H7/06
摘要:
A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.
公开/授权文献
- US20050127835A1 Planar ultra violet light detector 公开/授权日:2005-06-16