发明授权
US07391497B2 Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium
有权
图像形成状态调整系统，曝光方法和曝光装置以及程序和信息存储介质
- 专利标题： Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium
- 专利标题（中）： 图像形成状态调整系统，曝光方法和曝光装置以及程序和信息存储介质
-
申请号： US11736134申请日： 2007-04-17
-
公开(公告)号： US07391497B2公开(公告)日： 2008-06-24
- 发明人: Yasuo Shimizu , Shigeru Hirukawa , Kousuke Suzuki , Tomoyuki Matsuyama
- 申请人： Yasuo Shimizu , Shigeru Hirukawa , Kousuke Suzuki , Tomoyuki Matsuyama
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2002-020712 20020129; JP2002-158954 20020531
- 主分类号： G03B27/52
- IPC分类号： G03B27/52 ; G03B27/68
摘要：
A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.