发明授权
- 专利标题： Tunable-wavelength optical filter and method of manufacturing the same
- 专利标题（中）： 可调谐波长光学滤波器及其制造方法
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申请号： US11508017申请日： 2006-08-21
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公开(公告)号： US07393793B2公开(公告)日： 2008-07-01
- 发明人: Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
- 申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 代理机构： Blakely, Sokoloff, Taylor & Zafman LLP
- 优先权： KR2002-78443 20021210
- 主分类号： H01L21/302
- IPC分类号： H01L21/302
摘要：
A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.