- 专利标题: Probe for testing a device under test
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申请号: US11888957申请日: 2007-08-03
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公开(公告)号: US07394269B2公开(公告)日: 2008-07-01
- 发明人: K. Reed Gleason , Tim Lesher , Mike Andrews , John Martin
- 申请人: K. Reed Gleason , Tim Lesher , Mike Andrews , John Martin
- 申请人地址: US OR Beaverton
- 专利权人: Cascade Microtech, Inc.
- 当前专利权人: Cascade Microtech, Inc.
- 当前专利权人地址: US OR Beaverton
- 代理机构: Chernoff, Vilhauer, McClung & Stenzel
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.
公开/授权文献
- US20070273399A1 Probe for testing a device under test 公开/授权日:2007-11-29
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