发明授权
- 专利标题: Heterodyne laser interferometer using heterogenous mode helium-neon laser and super heterodyne phase measuring method
- 专利标题(中): 异步激光干涉仪采用异质氦氖激光和超外差相测量方法
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申请号: US10519469申请日: 2002-07-15
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公开(公告)号: US07394548B2公开(公告)日: 2008-07-01
- 发明人: Seung-Woo Kim , Min-Seok Kim
- 申请人: Seung-Woo Kim , Min-Seok Kim
- 申请人地址: KR Daejeon
- 专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人地址: KR Daejeon
- 代理机构: Meyer & Williams PC
- 代理商 Stuart H. Mayer, Esq.; Kevin L. Williams, Esq.
- 优先权: KR10-2002-0036184 20020627
- 国际申请: PCT/KR02/01330 WO 20020715
- 国际公布: WO2004/003526 WO 20040108
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
In the method and a device for detecting the phase of a moving object using a heterodyne interferometer, a heterogeneous mode helium-neon laser is used as a direct light source to increase a measuring speed, a measuring resolution, and minimize the loss of the light source. Signals, which have only a frequency difference between reference signals or measured signals and arbitrary signals, are extracted from signals which are obtained by multiplying the arbitrary frequency signals by the reference or measured signals. After frequencies of the reference and measured signals are converted, a phase difference of the extracted signals and displacement of the moving object is measured. The system includes a laser light source, an optical interferometer, a frequency converter, and a phase measurer. The light source uses output light, emitted from the laser generator, which is stabilized in frequency, and has two frequencies which are at right angles to each other and linearly polarized.