Invention Grant
- Patent Title: Micro sample heating apparatus and method of making the same
- Patent Title (中): 微型加样装置及其制作方法
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Application No.: US11426015Application Date: 2006-06-23
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Publication No.: US07395706B2Publication Date: 2008-07-08
- Inventor: Chin-Chang Pan , Yu-Fu Kang
- Applicant: Chin-Chang Pan , Yu-Fu Kang
- Applicant Address: TW Yang-Mei, Taoyuan Hsien
- Assignee: Touch Micro-System Technology Inc.
- Current Assignee: Touch Micro-System Technology Inc.
- Current Assignee Address: TW Yang-Mei, Taoyuan Hsien
- Agent Winston Hsu
- Priority: TW95112127A 20060406
- Main IPC: G01F1/68
- IPC: G01F1/68
Abstract:
A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
Public/Granted literature
- US20070234794A1 MICRO SAMPLE HEATING APPARATUS AND METHOD OF MAKING THE SAME Public/Granted day:2007-10-11
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