发明授权
- 专利标题: Etching method for metal layer of display panel
- 专利标题(中): 显示面板金属层蚀刻方法
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申请号: US11690137申请日: 2007-03-23
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公开(公告)号: US07396708B2公开(公告)日: 2008-07-08
- 发明人: Shiun-Chang Jan , Yi Lu , Yi-Ming Shan , Yi-Chun Chen
- 申请人: Shiun-Chang Jan , Yi Lu , Yi-Ming Shan , Yi-Chun Chen
- 申请人地址: TW Hsinshu
- 专利权人: Au Optronics Corporation
- 当前专利权人: Au Optronics Corporation
- 当前专利权人地址: TW Hsinshu
- 代理机构: Jianq Chyun IP Office
- 优先权: TW95142390A 20061116
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/84
摘要:
An etching process of a metal layer of a display panel is provided. First, a substrate with at least one display panel region, a testing device region, and a non-device region is provided. Then, a metal layer is formed over the substrate to cover the display panel region, the testing device region, and the non-device region. Next, a mask is formed on the metal layer to expose a portion of the metal layer. The area of the metal layer exposed by the mask substantially occupies 70%˜88% of the total area of the metal layer. Thereafter, a wet etching process is performed to remove the metal layer exposed by the mask.
公开/授权文献
- US20080121617A1 ETCHING METHOD FOR METAL LAYER OF DISPLAY PANEL 公开/授权日:2008-05-29
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