发明授权
- 专利标题: Laser fuse with efficient heat dissipation
- 专利标题(中): 激光熔丝具有高效散热
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申请号: US11299999申请日: 2005-12-12
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公开(公告)号: US07397106B2公开(公告)日: 2008-07-08
- 发明人: Hao-Yi Tsai , Chao-Hsiang Yang , Shang-Yun Hou , Chia-Lun Tsai , Shin-Puu Jeng
- 申请人: Hao-Yi Tsai , Chao-Hsiang Yang , Shang-Yun Hou , Chia-Lun Tsai , Shin-Puu Jeng
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L23/62
- IPC分类号: H01L23/62
摘要:
A semiconductor structure having an efficient thermal path and a method for forming the same are provided. The semiconductor structure includes a protection ring over a semiconductor substrate and substantially encloses a laser fuse structure. The laser fuse structure includes a laser fuse and a connection structure connecting the fuse to integrated circuits. The protection ring is thermally coupled to the semiconductor substrate by contacts. The semiconductor structure further includes a metal plate conducting heat generated by a laser beam to the protection ring.
公开/授权文献
- US20070132059A1 Laser fuse with efficient heat dissipation 公开/授权日:2007-06-14
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