Invention Grant
- Patent Title: Probe for a scanning microscope
- Patent Title (中): 探针扫描显微镜
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Application No.: US11145869Application Date: 2005-06-06
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Publication No.: US07398678B2Publication Date: 2008-07-15
- Inventor: Yoshikazu Nakayama , Takashi Okawa , Shigenobu Yamanaka , Akio Harada , Masatoshi Yasutake , Yoshiharu Shirakawabe
- Applicant: Yoshikazu Nakayama , Takashi Okawa , Shigenobu Yamanaka , Akio Harada , Masatoshi Yasutake , Yoshiharu Shirakawabe
- Applicant Address: JP Osaka JP Osaka JP Chiba
- Assignee: Yoshikazu Nakayama,Daiken Chemical Co., Ltd.,SII Nanotechnology, Inc.
- Current Assignee: Yoshikazu Nakayama,Daiken Chemical Co., Ltd.,SII Nanotechnology, Inc.
- Current Assignee Address: JP Osaka JP Osaka JP Chiba
- Agent William L. Androlia; H. Henry Koda
- Priority: JP2004-171794 20040609
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.
Public/Granted literature
- US20060150720A1 Probe for a scanning microscope Public/Granted day:2006-07-13
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