发明授权
- 专利标题: Probe for a scanning microscope
- 专利标题(中): 探针扫描显微镜
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申请号: US11145869申请日: 2005-06-06
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公开(公告)号: US07398678B2公开(公告)日: 2008-07-15
- 发明人: Yoshikazu Nakayama , Takashi Okawa , Shigenobu Yamanaka , Akio Harada , Masatoshi Yasutake , Yoshiharu Shirakawabe
- 申请人: Yoshikazu Nakayama , Takashi Okawa , Shigenobu Yamanaka , Akio Harada , Masatoshi Yasutake , Yoshiharu Shirakawabe
- 申请人地址: JP Osaka JP Osaka JP Chiba
- 专利权人: Yoshikazu Nakayama,Daiken Chemical Co., Ltd.,SII Nanotechnology, Inc.
- 当前专利权人: Yoshikazu Nakayama,Daiken Chemical Co., Ltd.,SII Nanotechnology, Inc.
- 当前专利权人地址: JP Osaka JP Osaka JP Chiba
- 代理商 William L. Androlia; H. Henry Koda
- 优先权: JP2004-171794 20040609
- 主分类号: G01B5/28
- IPC分类号: G01B5/28
摘要:
A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.
公开/授权文献
- US20060150720A1 Probe for a scanning microscope 公开/授权日:2006-07-13
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