发明授权
US07400488B2 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 有权
用于微带谐振器和滤波器的宽带调谐的可变电容膜致动器

Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
摘要:
A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
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