发明授权
- 专利标题: Semiconductor memory
- 专利标题(中): 半导体存储器
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申请号: US11078647申请日: 2005-03-11
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公开(公告)号: US07405441B2公开(公告)日: 2008-07-29
- 发明人: Joachim Deppe , Mathias Krause , Christoph Andreas Kleint , Christoph Ludwig , Jens-Uwe Sachse , Günther Wein
- 申请人: Joachim Deppe , Mathias Krause , Christoph Andreas Kleint , Christoph Ludwig , Jens-Uwe Sachse , Günther Wein
- 申请人地址: DE Munich
- 专利权人: Infineon Technology AG
- 当前专利权人: Infineon Technology AG
- 当前专利权人地址: DE Munich
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A non-volatile semiconductor memory (30) comprising a semiconductor substrate (1) and a plurality of memory cells (19) and methods for manufacturing such a memory is provided. Each memory cell (19) comprises a charge-trapping element (5), a gate stack (20), nitride spacers (10) and electrically insulating elements (21). The charge-trapping element (5) is arranged on the semiconductor substrate (1) and comprises a nitride layer (3) sandwiched between a bottom oxide layer (2) and a top oxide layer (4), the charge-trapping element (5) having two lateral sidewalls (24) opposed to one another. The gate stack (20) is arranged on top of the charge-trapping element (5), the gate stack having two lateral sidewalls (25) opposing one another. The electrically insulating elements (21) are disposed at opposing sidewalls (24) of the charge-trapping element (5) and cover the sidewalls (24) of the charge-trapping element (5). The nitride spacers (10) cover the electrically insulating elements (21) and are arranged on opposing sidewalls (25) of the gate stack (20) and on the electrically insulating elements (21).
公开/授权文献
- US20060205148A1 Semiconductor memory 公开/授权日:2006-09-14
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