Invention Grant
- Patent Title: Packaging chip and packaging method thereof
- Patent Title (中): 包装芯片及其包装方法
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Application No.: US11390220Application Date: 2006-03-28
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Publication No.: US07408257B2Publication Date: 2008-08-05
- Inventor: Kyu-dong Jung , Woon-bae Kim , In-sang Song , Moon-chul Lee , Jun-sik Hwang , Suk-jin Ham
- Applicant: Kyu-dong Jung , Woon-bae Kim , In-sang Song , Moon-chul Lee , Jun-sik Hwang , Suk-jin Ham
- Applicant Address: KR Suwon
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2005-0047854 20050603
- Main IPC: H01L23/04
- IPC: H01L23/04

Abstract:
A packaging chip in which a circuit module is packaged and a method of packaging a circuit module are provided. The packaging chip includes a base wafer; a circuit module on the base wafer; a packaging wafer having a cavity and combined with the base wafer so that the circuit module fits inside the cavity; a connecting electrode connecting upper and lower surfaces of the cavity; and a seed layer between the connecting electrode and the packaging wafer. The method includes etching a lower surface of the packaging wafer to form a cavity, stacking a metal layer in an area of the lower surface, combining the base wafer with the packaging wafer, polishing the packaging wafer, forming a viahole through the packaging wafer, stacking a seed layer on the packaging wafer, plating the inside of the viahole, removing the seed layer and forming an electrode.
Public/Granted literature
- US20060273444A1 Packaging chip and packaging method thereof Public/Granted day:2006-12-07
Information query
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