发明授权
- 专利标题： Pressure sensor with deflectable diaphragm
- 专利标题（中）： 压力传感器具有偏转膜片
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申请号： US11312062申请日： 2005-12-20
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公开(公告)号： US07415886B2公开(公告)日： 2008-08-26
- 发明人: Mark Schumacher , Andrew Klosinski
- 申请人： Mark Schumacher , Andrew Klosinski
- 申请人地址： US MN Eden Prairie
- 专利权人： Rosemount Inc.
- 当前专利权人： Rosemount Inc.
- 当前专利权人地址： US MN Eden Prairie
- 代理机构： Westman, Champlin & Kelly, P.A.
- 主分类号： G01L9/12
- IPC分类号： G01L9/12
摘要：
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.
公开/授权文献
- US20070151349A1 Pressure sensor with deflectable diaphragm 公开/授权日：2007-07-05
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