发明授权
- 专利标题： Electrically programmable fuse structures with narrowed width regions configured to enhance current crowding and methods of fabrication thereof
- 专利标题（中）： 具有变宽的宽度区域的电可编程熔丝结构被配置为增强电流拥挤及其制造方法
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申请号： US11372386申请日： 2006-03-09
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公开(公告)号： US07417300B2公开(公告)日： 2008-08-26
- 发明人: Roger A. Booth, Jr. , Jack A. Mandelman , William R. Tonti
- 申请人： Roger A. Booth, Jr. , Jack A. Mandelman , William R. Tonti
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Heslin Rothenberg Farley & Mesiti PC
- 主分类号： H01L29/00
- IPC分类号： H01L29/00
摘要：
Electrically programmable fuse structures and methods of fabrication thereof are presented, wherein a fuse includes first and second terminal portions interconnected by an elongate fuse element. The first terminal portion has a maximum width greater than a maximum width of the fuse element, and the fuse includes a narrowed width region where the first terminal portion and fuse element interface. The narrowed width region extends at least partially into and includes part of the first terminal portion. The width of the first terminal portion in the narrowed region is less than the maximum width of the first terminal portion to enhance current crowding therein. In another implementation, the fuse element includes a restricted width region wherein width of the fuse element is less than the maximum width thereof to enhance current crowding therein, and length of the restricted width region is less than a total length of the fuse element.
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