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US07419532B2 Deposition system and method 有权
沉积系统和方法

Deposition system and method
摘要:
According to an exemplary embodiment of the present disclosure, a method of loading a filtering device includes measuring a metric indicative of an initial loading of the filtering device and desirably positioning a quantity of matter proximate the filtering device. The method also includes applying a negative pressure to the filtering device such that at least a portion of the quantity of matter is drawn into the filtering device. The method further includes measuring a metric indicative of a final loading of the filtering device.
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