发明授权
US07420249B2 Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer
失效
在半导体层中形成的半导体器件,其布置在基板上,绝缘膜和空腔中的一个介于基板和半导体层之间
- 专利标题: Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer
- 专利标题(中): 在半导体层中形成的半导体器件,其布置在基板上,绝缘膜和空腔中的一个介于基板和半导体层之间
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申请号: US11849682申请日: 2007-09-04
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公开(公告)号: US07420249B2公开(公告)日: 2008-09-02
- 发明人: Tsutomu Sato , Hajime Nagano , Ichiro Mizushima , Takashi Yamada , Yuso Udo , Shinichi Nitta
- 申请人: Tsutomu Sato , Hajime Nagano , Ichiro Mizushima , Takashi Yamada , Yuso Udo , Shinichi Nitta
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2001-398184 20011227
- 主分类号: H01L27/01
- IPC分类号: H01L27/01 ; H01L27/12 ; H01L31/0392
摘要:
A semiconductor device including a first semiconductor layer formed on a semiconductor substrate, a second semiconductor layer surrounding the first semiconductor layer, the second semiconductor layer being formed on the semiconductor substrate with one of an insulating film and a cavity, and a third semiconductor layer surrounding the second semiconductor layer, the third semiconductor layer being formed on the semiconductor substrate.
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