发明授权
- 专利标题: System for heat dissipation in semiconductor devices
- 专利标题(中): 半导体器件散热系统
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申请号: US10801475申请日: 2004-03-16
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公开(公告)号: US07420277B2公开(公告)日: 2008-09-02
- 发明人: Hsien-Wei Chen , Jiun-Lin Yeh , Shin-Puu Jeng , Yi-Lung Cheng
- 申请人: Hsien-Wei Chen , Jiun-Lin Yeh , Shin-Puu Jeng , Yi-Lung Cheng
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes Boone, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
The present disclosure provides a method and system for heat dissipation in semiconductor devices. In one example, an integrated circuit semiconductor device includes a semiconductor substrate; one or more metallurgy layers connected to the semiconductor substrate, and each of the one or more metallurgy layers includes: one or more conductive lines; and one or more dummy structures between the one or more conductive lines and at least two of the one or more dummy structures are connected; and one or more dielectric layers between the one or more metallurgy layers.
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