Invention Grant
- Patent Title: High voltage transistor and method of manufacturing the same
- Patent Title (中): 高压晶体管及其制造方法
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Application No.: US11732765Application Date: 2007-04-04
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Publication No.: US07422949B2Publication Date: 2008-09-09
- Inventor: Tae-kwang Yu , Hee-seog Jeon , Seung-beom Yoon , Yong-tae Kim
- Applicant: Tae-kwang Yu , Hee-seog Jeon , Seung-beom Yoon , Yong-tae Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello LLP
- Priority: KR10-2003-0055363 20030811
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
The present invention relates to a high voltage transistor and method of manufacturing the same. The high voltage transistor includes: a channel region which is formed in a semiconductor substrate; a gate insulating film which is formed on the channel region of the semiconductor substrate; a low concentration source region and a low concentration drain region having the channel region interposed therebetween and each being formed in the semiconductor substrate; a high concentration source region which is formed to be spaced away from the channel region by a first distance; a high concentration drain region which is formed to be spaced away from the channel region by a second distance that is larger than the first distance; a gate electrode which has a gate bottom portion interfacing with the gate insulating film over the channel region, and a gate top portion integrated with the gate bottom portion and protruding by a predetermined length from a top of the gate bottom portion to extend over the low concentration drain region; a first metal silicide layer which is formed on the high concentration source region; and a second metal silicide layer which is formed on the high concentration drain region.
Public/Granted literature
- US20070184622A1 High voltage transistor and method of manufacturing the same Public/Granted day:2007-08-09
Information query
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