Invention Grant
- Patent Title: Method and apparatus for monitoring an interferometer
- Patent Title (中): 用于监测干涉仪的方法和装置
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Application No.: US10530934Application Date: 2002-10-11
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Publication No.: US07423760B2Publication Date: 2008-09-09
- Inventor: Wolf Steffens , Ulrich Kallmann , Bernd Nebendahl , Emmerich Mueller , Ralf Haeussler
- Applicant: Wolf Steffens , Ulrich Kallmann , Bernd Nebendahl , Emmerich Mueller , Ralf Haeussler
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/EP02/11390 WO 20021011
- International Announcement: WO2004/033986 WO 20040422
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An apparatus and to a method of monitoring an interferometer, comprising the steps of: coupling a first optical signal into the interferometer and into a wavelength reference element, detecting a first resulting interference signal being a result of interference of parts of the first optical signal in the interferometer, detecting a resulting reference signal of the wavelength reference element, the resulting reference signal being a result of interaction of the first optical signal with the wavelength reference element, and comparing the first resulting interference signal with the resulting reference signal to detect a drift of the interferometer, if any.
Public/Granted literature
- US20060119857A1 Interferometer monitoring Public/Granted day:2006-06-08
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