发明授权
- 专利标题: Test data analyzing system and test data analyzing program
- 专利标题(中): 测试数据分析系统和测试数据分析程序
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申请号: US11483740申请日: 2006-07-11
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公开(公告)号: US07424336B2公开(公告)日: 2008-09-09
- 发明人: Makoto Ono , Junko Konishi
- 申请人: Makoto Ono , Junko Konishi
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High Technologies Corporation
- 当前专利权人: Hitachi High Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2005-201046 20050711
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
Disclosed is a test data analyzing method and system for use in estimation of a defect cause of a product, such as, an integrated circuit, a liquid crystal display, an optical transceiver, a thin film magnetic head, etc., which is fabricated through plural processes. The estimation of a defect cause is achieved by selecting a wafer number to be analyzed, reading test data, reading fabrication line data, counting frequency of machine codes by wafers, grouping test data by machine codes or frequencies, comparing test data distributions between groups by machine codes, and comparing results between machine codes.
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