- 专利标题: Methods for coupling diamond structures to photonic devices
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申请号: US11580344申请日: 2006-10-13
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公开(公告)号: US07427525B2公开(公告)日: 2008-09-23
- 发明人: Charles Santori , Sean Spillane , Marco Fiorentino , David Fattal , Raymond G. Beausoleil , Wei Wu , Theodore I. Kamins
- 申请人: Charles Santori , Sean Spillane , Marco Fiorentino , David Fattal , Raymond G. Beausoleil , Wei Wu , Theodore I. Kamins
- 申请人地址: US TX Houston
- 专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人地址: US TX Houston
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Various embodiments of the present invention are directed to methods for coupling semiconductor-based photonic devices to diamond. In one embodiment of the present invention, a method for coupling a photonic device with a diamond structure comprises embedding the diamond structure in a first substrate, where the first substrate comprises a first transparent material. The photonic device is formed in a semiconductor material, which is supported by a second substrate. An intermediate structure is formed by depositing a second transparent material over the photonic device. The second transparent material may have substantially the same refractive index as the first transparent material. The intermediate structure is then separated from the second substrate, and the intermediated structure is adhered to the first substrate so that the photonic device optically couples with the diamond structure.
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