Invention Grant
- Patent Title: Cyclic error compensation in interferometry systems
- Patent Title (中): 干涉测量系统中的循环误差补偿
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Application No.: US11060173Application Date: 2005-02-17
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Publication No.: US07428685B2Publication Date: 2008-09-23
- Inventor: Frank C. Demarest , Henry A. Hill
- Applicant: Frank C. Demarest , Henry A. Hill
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G06F11/00
- IPC: G06F11/00

Abstract:
The invention features a method including: (i) providing an interference signal S(t) from two beams directed along different paths, wherein the signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time; (ii) providing one or more coefficients representative of one or more errors that cause the signal S(t) to deviate from an ideal expression of the form A1 cos(ωRt+φ(t)+ζ1), where A1 and ζ1 are constants, ωR is an angular frequency difference between the two beams before being directed along the different paths, and φ(t)=nk{tilde over (L)}(t), with k=2π/λ and λ equal to a wavelength for the beams; (iii) calculating a linear combination of values of the signal S(t); and (iv) reducing the effect of the deviation of S(t) from the ideal expression on an estimate of {tilde over (L)}(t) using an error signal generated from the coefficients and one or more error basis functions derived at least in part from the linear combination of values of the signal S(t).
Public/Granted literature
- US20050166118A1 Cyclic error compensation in interferometry systems Public/Granted day:2005-07-28
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