Invention Grant
- Patent Title: Multi-scale cantilever structures having nano sized holes and method of preparing the same
- Patent Title (中): 具有纳米孔的多尺度悬臂结构及其制备方法
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Application No.: US11553283Application Date: 2006-10-26
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Publication No.: US07432571B2Publication Date: 2008-10-07
- Inventor: Jung Hyun Lee , Pyung Soo Lee , Kun Hong Lee , Nayoung Shin
- Applicant: Jung Hyun Lee , Pyung Soo Lee , Kun Hong Lee , Nayoung Shin
- Applicant Address: KR Pohang KR Pohang
- Assignee: Postech Foundation,Postech Academy-Industry Foundation
- Current Assignee: Postech Foundation,Postech Academy-Industry Foundation
- Current Assignee Address: KR Pohang KR Pohang
- Agency: Rothwell, Figg, Ernst & Manbeck
- Priority: KR10-2005-0101748 20051027
- Main IPC: H01L31/00
- IPC: H01L31/00
Abstract:
Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.
Public/Granted literature
- US20070137308A1 MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME Public/Granted day:2007-06-21
Information query
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